Degradation of thin tungsten filaments at high temperature in HWCVD
| Autor: | Frigeri, P.A., Nos, O., Bertomeu, J. |
|---|---|
| Zdroj: | In Thin Solid Films 30 January 2015 575:34-37 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Frigeri, P.A., Nos, O., Bertomeu, J. |
|---|---|
| Zdroj: | In Thin Solid Films 30 January 2015 575:34-37 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect