Structural and optical properties of post-annealed atomic-layer-deposited HfO2 thin films on GaAs
| Autor: | Bennett, N.S., Cherkaoui, K., Wong, C.S., O'Connor, É., Monaghan, S., Hurley, P., Chauhan, L., McNally, P.J. |
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| Zdroj: | In Thin Solid Films 31 October 2014 569:104-112 |
| Databáze: | ScienceDirect |
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