On determining the optical properties and layer structure from spectroscopic ellipsometric data using automated artifact minimization method
| Autor: | Budai, J., Farkas, B., Horváth, Z.L., Geretovszky, Zs. |
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| Zdroj: | In Thin Solid Films 30 September 2014 567:14-19 |
| Databáze: | ScienceDirect |
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