Structural and optical properties of zirconia thin films deposited by reactive high-power impulse magnetron sputtering
| Autor: | Zhao, Xiaoli, Jin, Jie, Cheng, Jui-Ching, Lee, Jyh-Wei, Wu, Kuo-Hong, Lin, Kuo-Cheng, Tsai, Jung-Ruey, Liu, Kou-Chen |
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| Zdroj: | In Thin Solid Films 3 November 2014 570 Part B:404-411 |
| Databáze: | ScienceDirect |
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