Deposition and current conduction of mixed hexagonal and cubic phases of AlN/p-Si films prepared by vacuum arc discharge: Effect of deposition temperature
| Autor: | Abdallah, B., Al-Khawaja, S., Alkhawwam, A., Ismail, I.M. |
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| Zdroj: | In Thin Solid Films 1 July 2014 562:152-158 |
| Databáze: | ScienceDirect |
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