Effects of growth temperature on performance and stability of zinc oxide thin film transistors fabricated by thermal atomic layer deposition
| Autor: | Cho, Sung Woon, Ahn, Cheol Hyoun, Yun, Myeong Gu, Kim, So Hee, Cho, Hyung Koun |
|---|---|
| Zdroj: | In Thin Solid Films 1 July 2014 562:597-602 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect