Thermodynamics of the production of condensed phases in the chemical vapor deposition of ZrC in the ZrCl4–CH4–H2–Ar system
| Autor: | Liu, Haiping, Deng, Juanli, Yang, Lianli, Cheng, Laifei, Luo, Lei, Zhu, Yan, Su, Kehe, Zhang, Litong |
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| Zdroj: | In Thin Solid Films 2 May 2014 558:462-467 |
| Databáze: | ScienceDirect |
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