1,2,4-Triazole as a corrosion inhibitor in copper chemical mechanical polishing

Autor:	Jiang, Liang, Lan, Yongqing, He, Yongyong, Li, Yan, Li, Yuzhuo, Luo, Jianbin
Zdroj:	In Thin Solid Films 1 April 2014 556:395-404
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect