Elastic properties of tensile nitrogen-plasma-treated multilayer silicon nitride films
| Autor: | Braccini, M., Volpi, F., Devos, A., Raymond, G., Benoit, D., Morin, P. |
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| Zdroj: | In Thin Solid Films 31 January 2014 551:120-126 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect