Real time spectroscopic ellipsometry for analysis and control of thin film polycrystalline semiconductor deposition in photovoltaics
| Autor: | Koirala, Prakash, Attygalle, Dinesh, Aryal, Puruswottam, Pradhan, Puja, Chen, Jie, Marsillac, Sylvain, Ferlauto, Andre S., Podraza, Nikolas J., Collins, Robert W. |
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| Zdroj: | In Thin Solid Films 28 November 2014 571 Part 3:442-446 |
| Databáze: | ScienceDirect |
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