Transitions from straight-sided to telephone cord buckles in SiAlNx films

Autor: Yu, Sen-Jiang, Chen, Miao-Gen, Si, Ping-Zhan, Zhou, Hong, Chen, Jun, Zhang, Xiao-Fei, Zhang, Yong-Ju
Zdroj: In Thin Solid Films 1 January 2014 550:480-485
Databáze: ScienceDirect