Transitions from straight-sided to telephone cord buckles in SiAlNx films
| Autor: | Yu, Sen-Jiang, Chen, Miao-Gen, Si, Ping-Zhan, Zhou, Hong, Chen, Jun, Zhang, Xiao-Fei, Zhang, Yong-Ju |
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| Zdroj: | In Thin Solid Films 1 January 2014 550:480-485 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect