The deposition of low temperature sputtered In2O3 films using pulsed d.c magnetron sputtering from a powder target
| Autor: | Karthikeyan, Sreejith, Hill, Arthur E., Pilkington, Richard D. |
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| Zdroj: | In Thin Solid Films 1 January 2014 550:140-144 |
| Databáze: | ScienceDirect |
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