Atomic layer deposition of strontium titanate films from Sr(iPr3Cp)2, Ti[N(CH3)2]4 and H2O
| Autor: | Rentrop, S., Moebus, T., Abendroth, B., Strohmeyer, R., Schmid, A., Weling, T., Hanzig, J., Hanzig, F., Stöcker, H., Meyer, D.C. |
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| Zdroj: | In Thin Solid Films 1 January 2014 550:53-58 |
| Databáze: | ScienceDirect |
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