Atmospheric pressure plasma enhanced chemical vapor deposition of zinc oxide and aluminum zinc oxide
| Autor: | Johnson, Kyle W., Guruvenket, Srinivasan, Sailer, Robert A., Ahrenkiel, S. Phillip, Schulz, Douglas L. |
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| Zdroj: | In Thin Solid Films 2 December 2013 548:210-219 |
| Databáze: | ScienceDirect |
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