Improvement of photoluminescence from Ge layer with patterned Si3N4 stressors
| Autor: | Oda, Katsuya, Okumura, Tadashi, Tani, Kazuki, Saito, Shin-ichi, Ido, Tatemi |
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| Zdroj: | In Thin Solid Films 30 April 2014 557:355-362 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect