First-principles molecular dynamics study of the thermal stability of the BN, AlN, SiC and SiN interfacial layers in TiN-based heterostructures: Comparison with experiments
| Autor: | Ivashchenko, V.I., Vepřek, S. |
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| Zdroj: | In Thin Solid Films 31 October 2013 545:391-400 |
| Databáze: | ScienceDirect |
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