N-type doping of BaSi2 epitaxial films by phosphorus ion implantation and thermal annealing
| Autor: | Hara, Kosuke O., Hoshi, Yusuke, Usami, Noritaka, Shiraki, Yasuhiro, Nakamura, Kotaro, Toko, Kaoru, Suemasu, Takashi |
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| Zdroj: | In Thin Solid Films 30 April 2014 557:90-93 |
| Databáze: | ScienceDirect |
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