Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices
Autor: | Schlögl, M., Mayer, B., Paulitsch, J., Mayrhofer, P.H. |
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Zdroj: | In Thin Solid Films 31 October 2013 545:375-379 |
Databáze: | ScienceDirect |
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