Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices

Autor: Schlögl, M., Mayer, B., Paulitsch, J., Mayrhofer, P.H.
Zdroj: In Thin Solid Films 31 October 2013 545:375-379
Databáze: ScienceDirect