Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
| Autor: | Lee, Jong Geol, Kim, Hyun Gi, Kim, Sung Soo |
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| Zdroj: | In Thin Solid Films 1 May 2013 534:515-519 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect