Ultimate nanopatterning of Si substrate using filtered liquid metal alloy ion source-focused ion beam
| Autor: | Benkouider, A., Berbezier, I., Ronda, A., Favre, L., Gomes, E. Ruiz, Marcus, I.C., Alonso, I., Delobbe, A., Sudraud, P. |
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| Zdroj: | In Thin Solid Films 30 September 2013 543:69-73 |
| Databáze: | ScienceDirect |
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