Fabrication of bridged-grain polycrystalline silicon thin film transistors by nanoimprint lithography
| Autor: | Zhou, Wei, Ho, Jacob Yeuk Lung, Zhao, Shuyun, Chen, Rongsheng, Wong, Man, Kwok, Hoi-Sing |
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| Zdroj: | In Thin Solid Films 1 May 2013 534:636-639 |
| Databáze: | ScienceDirect |
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