Formation of polycrystalline BaSi2 films by radio-frequency magnetron sputtering for thin-film solar cell applications

Autor: Yoneyama, Takahiro, Okada, Atsushi, Suzuno, Mitsushi, Shibutami, Tetsuo, Matsumaru, Keitaro, Saito, Noriyuki, Yoshizawa, Noriko, Toko, Kaoru, Suemasu, Takashi
Zdroj: In Thin Solid Films 1 May 2013 534:116-119
Databáze: ScienceDirect