Optical properties of aluminum nitride thin films grown by direct-current magnetron sputtering close to epitaxy
| Autor: | Stolz, A., Soltani, A., Abdallah, B., Charrier, J., Deresmes, D., Jouan, P.-Y., Djouadi, M.A., Dogheche, E., De Jaeger, J.-C. |
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| Zdroj: | In Thin Solid Films 1 May 2013 534:442-445 |
| Databáze: | ScienceDirect |
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