Effect of energetic ion beam irradiation on structural and optical properties of a-Si:H thin films
| Autor: | Goh, Boon Tong, Ngoi, Siew Kien, Yap, Seong Ling, Wong, Chiow San, Rahman, Saadah Abdul |
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| Zdroj: | In Thin Solid Films 1 February 2013 529:159-163 |
| Databáze: | ScienceDirect |
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