Electrical properties of AlNxOy thin films prepared by reactive magnetron sputtering
| Autor: | Borges, J., Martin, N., Barradas, N.P., Alves, E., Eyidi, D., Beaufort, M.F., Riviere, J.P., Vaz, F., Marques, L. |
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| Zdroj: | In Thin Solid Films 31 August 2012 520(21):6709-6717 |
| Databáze: | ScienceDirect |
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