Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures
| Autor: | Chakraborty, B.R., Halder, S.K., Maurya, K.K., Srivastava, A.K., Toutam, V.K., Dalai, M.K., Sehgal, G., Singh, S. |
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| Zdroj: | In Thin Solid Films 1 August 2012 520(20):6409-6414 |
| Databáze: | ScienceDirect |
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