Kinetic study of solid phase crystallisation of expanding thermal plasma deposited a-Si:H

Autor: Law, F., Hoex, B., Wang, J., Luther, J., Sharma, K., Creatore, M., Van de Sanden, M.C.M.
Zdroj: In Thin Solid Films 30 June 2012 520(17):5820-5825
Databáze: ScienceDirect