Comparative analysis of oxide phase formation and its effects on electrical properties of SiO2/InSb metal-oxide-semiconductor structures
| Autor: | Lee, Jaeyel, Park, Sehun, Kim, Jungsub, Yang, Changjae, Kim, Sujin, Seok, Chulkyun, Park, Jinsub, Yoon, Euijoon |
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| Zdroj: | In Thin Solid Films 1 June 2012 520(16):5382-5385 |
| Databáze: | ScienceDirect |
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