Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol–gel processing
| Autor: | Franc, Janyce, Barnier, Vincent, Vocanson, Francis, Gamet, Emilie, Lesage, Maryline, Jamon, Damien, Jourlin, Yves |
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| Zdroj: | In Thin Solid Films 31 July 2012 520(19):6050-6056 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect