Improvement of InN layers deposited on Si(111) by RF sputtering using a low-growth-rate InN buffer layer
| Autor: | Valdueza-Felip, S., Ibáñez, J., Monroy, E., González-Herráez, M., Artús, L., Naranjo, F.B. |
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| Zdroj: | In Thin Solid Films 31 January 2012 520(7):2805-2809 |
| Databáze: | ScienceDirect |
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