Epitaxial growth and electrical measurement of single crystalline Pb(Zr0.52Ti0.48)O3 thin film on Si(001) for micro-electromechanical systems
| Autor: | Yin, S. a, b, ⁎, Niu, G. a, Vilquin, B. a, Gautier, B. c, Le Rhun, G. b, Defay, E. b, ⁎, Robach, Y. a |
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| Zdroj: | In Thin Solid Films 1 May 2012 520(14):4572-4575 |
| Databáze: | ScienceDirect |
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