Comparison of CrAlN layers obtained with one (CrAl) or two targets (Cr and Al) by magnetron sputtering
| Autor: | Nouveau, C., Tlili, B., Aknouche, H., Benlatreche, Y., Patel, B. |
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| Zdroj: | In Thin Solid Films 31 January 2012 520(7):2932-2937 |
| Databáze: | ScienceDirect |
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