Site-controlled fabrication of dimension-tunable Si nanowire arrays on patterned (001)Si substrates
Autor: | Cheng, S.L., Lo, C.H., Chuang, C.F., Lee, S.W. |
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Zdroj: | In Thin Solid Films 1 February 2012 520(8):3309-3313 |
Databáze: | ScienceDirect |
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