Faceting and nanostructure effects in Si and SiGe epitaxy
| Autor: | Dutartre, Didier, Seiss, Birgit, Campidelli, Yves, Pellissier-Tanon, Denis, Barge, David, Pantel, Roland |
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| Zdroj: | In Thin Solid Films 1 February 2012 520(8):3163-3169 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect