Growth and characterization of silicon carbide thin films on silicon using a hollow cathode pulse sputtering technique
| Autor: | Huguenin-Love, James ⁎, Soukup, Rodney J., Ianno, Natale J., Lauer, Noel T. |
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| Zdroj: | In Thin Solid Films 31 January 2012 520(7):2395-2408 |
| Databáze: | ScienceDirect |
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