Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator

Autor:	Papa, F., Gerdes, H., Bandorf, R., Ehiasarian, A.P., Kolev, I., Braeuer, G., Tietema, R., Krug, T.
Zdroj:	In Thin Solid Films 2011 520(5):1559-1563
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect