Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator
| Autor: | Papa, F., Gerdes, H., Bandorf, R., Ehiasarian, A.P., Kolev, I., Braeuer, G., Tietema, R., Krug, T. |
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| Zdroj: | In Thin Solid Films 2011 520(5):1559-1563 |
| Databáze: | ScienceDirect |
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