Remote plasma sputtering of indium tin oxide thin films for large area flexible electronics
| Autor: | Yeadon, A.D., Wakeham, S.J., Brown, H.L., Thwaites, M.J., Whiting, M.J., Baker, M.A. |
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| Zdroj: | In Thin Solid Films 2011 520(4):1207-1211 |
| Databáze: | ScienceDirect |
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