Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films
| Autor: | Wilke, Marcus, Teichert, Gerd, Gemma, Ryota, Pundt, Astrid, Kirchheim, Reiner, Romanus, Henry, Schaaf, Peter |
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| Zdroj: | In Thin Solid Films 2011 520(5):1660-1667 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect