Room temperature deposition of self-assembled Al nanoclusters on stepped sapphire (0001) surface and subsequent nitridation

Autor: Qi, B., Agnarsson, B., Ólafsson, S., Gíslason, H.P., Göthelid, M.
Zdroj: In Thin Solid Films 2011 520(1):64-73
Databáze: ScienceDirect