Room temperature deposition of self-assembled Al nanoclusters on stepped sapphire (0001) surface and subsequent nitridation
Autor: | Qi, B., Agnarsson, B., Ólafsson, S., Gíslason, H.P., Göthelid, M. |
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Zdroj: | In Thin Solid Films 2011 520(1):64-73 |
Databáze: | ScienceDirect |
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