The effect of hard nitridation on Al 2O 3 using a radio frequency operated plasma cell
| Autor: | Agnarsson, B., Qi, B., Göthelid, M., Olafsson, S., Gislason, H.P. |
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| Zdroj: | In Thin Solid Films 2011 519(22):7796-7802 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Agnarsson, B., Qi, B., Göthelid, M., Olafsson, S., Gislason, H.P. |
|---|---|
| Zdroj: | In Thin Solid Films 2011 519(22):7796-7802 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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