Magnetron sputtering modes during pulsed deposition process determined by the analysis of power supply parameter
| Autor: | Krówka, K., Wiatrowski, A., Posadowski, W.M. |
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| Zdroj: | In Thin Solid Films 2 April 2012 520(12):4127-4130 |
| Databáze: | ScienceDirect |
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