Optimization of organized silicon nanowires growth inside porous anodic alumina template using hot wire chemical vapor deposition process

Autor: Lefeuvre, E., Kim, K.H., He, Z.B., Maurice, J.-L., Châtelet, M., Pribat, D., Cojocaru, C.S.
Zdroj: In Thin Solid Films 2011 519(14):4603-4608
Databáze: ScienceDirect