Single-chamber filament-assisted chemical vapor deposition of polymer and organosilicate films for air gap interconnect formation
| Autor: | Lee, Eric, Faguet, Jacques, Brcka, Jozef, Akiyama, Osayuki, Liu, Junjun, Toma, Dorel |
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| Zdroj: | In Thin Solid Films 2011 519(14):4571-4573 |
| Databáze: | ScienceDirect |
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