Piezoresistive silicon thin film sensor array for biomedical applications

Autor: Alpuim, P., Correia, V., Marins, E.S., Rocha, J.G., Trindade, I.G., Lanceros-Mendez, S.
Zdroj: In Thin Solid Films 2011 519(14):4574-4577
Databáze: ScienceDirect