Application of scatterometric porosimetry to characterize porous ultra low-k patterned layers
| Autor: | Licitra, C., Bouyssou, R., El Kodadi, M., Haberfehlner, G., Chevolleau, T., Hazart, J., Virot, L., Besacier, M., Schiavone, P., Bertin, F. |
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| Zdroj: | In Thin Solid Films 28 February 2011 519(9):2825-2829 |
| Databáze: | ScienceDirect |
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