Characterization of damage structure in ion implanted SiC using high photon energy synchrotron ellipsometry
| Autor: | Petrik, P., Zolnai, Z., Polgar, O., Fried, M., Betyak, Z., Agocs, E., Lohner, T., Werner, C., Röppischer, M., Cobet, C. |
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| Zdroj: | In Thin Solid Films 28 February 2011 519(9):2791-2794 |
| Databáze: | ScienceDirect |
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