Spectroscopic ellipsometry characterization of high-k gate stacks with Vt shift layers
| Autor: | Di, Ming, Bersch, Eric, Clark, Robert, Consiglio, Steven, Leusink, Gert, Diebold, Alain C. |
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| Zdroj: | In Thin Solid Films 28 February 2011 519(9):2889-2893 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect