Investigation of optical properties of benzocyclobutene wafer bonding layer used for 3D interconnects via infrared spectroscopic ellipsometry
| Autor: | Kamineni, Vimal K., Singh, Pratibha, Kong, LayWai, Hudnall, John, Qureshi, Jamal, Taylor, Chris, Rudack, Andy, Arkalgud, Sitaram, Diebold, Alain C. |
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| Zdroj: | In Thin Solid Films 28 February 2011 519(9):2924-2928 |
| Databáze: | ScienceDirect |
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