Dielectric functions of PECVD-grown silicon nanoscale inclusions within rapid thermal annealed silicon-rich silicon nitride films
| Autor: | Keita, A.-S., En Naciri, A., Delachat, F., Carrada, M., Ferblantier, G., Slaoui, A., Stchakovsky, M. |
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| Zdroj: | In Thin Solid Films 28 February 2011 519(9):2870-2873 |
| Databáze: | ScienceDirect |
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